Substrate size | Up to 150 mm diameter (6-inch) |
Process chamber | Stainless steel cold wall chamber technology |
Temperature range | From 450°C up to 2000°C |
Temperature control | Pyrometer temperature control |
Vacuum and gas | Up to 8 process gas lines with digital mass flow controllers |
Control | Full PC control, up to 400 operations per recipe |
Facilities:
Dimensions and weight:
Width | 800 mm | 31.5" |
Depth | 1,750 mm | 68.9" |
Height | 2,000 mm | 78.8" |
Mass | 500 kg | 1,102 lbs |
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