Zenith 150

Discover the Zenith-150 rtp - system from annealsyS

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Applications

 

  • Silicon Carbide implant annealing
  • Graphene by SiC sublimation
  • RTCVD of graphene
  • High temperature annealing

 

Specifications

 

  • The Zenith-150 high temperature rapid thermal processor can process samples up to 6-inch diameter at temperature up to 2000°C, one hour.
  • The system has a stainless steel water-cooled chamber. The cold wall chamber technology provides significant advantages: low memory effect, higher cooling rates.
  • The high temperature tungsten heaters provide enhanced temperature uniformity.
  • The pyrometer associated with the fast digital PID controller assure accurate and repeatable thermal control across the temperature range.
  • The design process chamber provides easy loading and unloading of the substrates and the installation of the thermocouple for calibration.

 

Basic features

Substrate size

Up to 150 mm diameter (6-inch)

Process chamber

Stainless steel cold wall chamber technology
Low inertia tungsten heating elements

Temperature range

From 450°C up to 2000°C

Temperature control

Pyrometer temperature control
Fast digital PID / RTP temperature controller

Vacuum and gas

Up to 8 process gas lines with digital mass flow controllers
One purge gas line
Vacuum valve and vacuum gauge
Turbomolecular pump

Control

Full PC control, up to 400 operations per recipe
Human interface designed in respect of SEMI E95-0200
Full data logging and process historicals

Optical features

 

  • Graphite and silicon carbide coated susceptors
  • Soft-pumping valve
  • Automatic pressure control with throttle valve

 

Customer support 

 

  • Outstanding customer support for hardware, software and process
  • Efficient remote support using software diagnostic capabilities
  • High expertise in RTP processes of our process engineers
  • Capability to support customer for process optimization

 

Physical specifications

 

Facilities:

  • Voltage : 3x400V+N+Gr / 3x220V+Gr
  • Power : 38 kW
  • Water : 2 to 4 bars, pressure drop 1 bar, 15 l/mn
  • Compressed air : 6 bars (valve actuation)
  • Process gas fittings : VCR ¼

 

Dimensions and weight:

Width

800 mm

31.5"

Depth

1,750 mm

68.9"

Height

2,000 mm

78.8"

Mass

500 kg

1,102 lbs

Click here to find out more about Zenith 150.